
TSMC’s zero-waste production plant has been in operation since the beginning of the year. And now, the chipmaker has revealed how it all happens inside the facility. With novel circular processes, TSMC recycles chemical waste to be reused again in production. Let’s take a look.
TSMC’s zero-waste production center in the Central Taiwan Science Park began operations this year. On Wednesday, outsiders can finally get a glimpse of what’s inside.
Chen Shih-cheng
FTV reporter
How does Taiwan’s silicon shield TSMC turn rubble into gold? The secret is right here.
The zero-waste production center spanning 4.54 hectares is a joint project with five partner companies. Inside, wastes from semiconductor production processes are recycled and reused, and turned into industrial- and consumer-grade circular products.
Y. P. Chin
TSMC executive vice president and COO
Over the past year of trial operations, the circular goods we’ve produced have fully reached our revenue threshold.
For example, waste isopropanol, used in cleaning silicon wafers and in wet etching processes, is recycled through a distillation process. The regenerated isopropanol can then be reused in production. The production plant can recycle 2,300 tons of chemical waste every month to produce 300 tons of regenerated isopropanol.
Y. P. Chin
TSMC executive vice president and COO
In the future, the zero-waste center is expected to help us reduce around 130,000 tons of waste, which we would otherwise commission to a third-party waste manager. This accounts for more than 85% of waste from our Central Taiwan Science Park facilities. From an environmental standpoint, this is a reduction worth around NT$1.5 billion a year in environmental costs.
With innovative circular processes, TSMC again showcases its leadership in the chip industry.
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護國神山台積電,在中科園區,打造全台首座零廢製造中心,2024年正式商轉,能把半導體製程中,產生的廢棄物,像是氟化鈣污泥,氧化矽,異丙醇廢液等,和五家協力廠商合作,回收再利用,甚至部分再生產品,還能重新運用回到半導體晶圓製程。
台積電位在中科園區的零廢製造中心,2024年正式商轉,這一回首度曝光。
[[民視新聞記者 陳仕承]]
“護國神山台積電,如何化腐朽為神奇,秘密就在這座廠區”
這座台積電零廢製造中心,佔地4.54公頃,領軍五家協力廠商,展開神奇魔法,在廠區內,成功將半導體製程產生的廢棄物,回收再利用,重新變成工業級,和電子級再生產品。
[[台積電執行副總經理暨共同營運長 秦永沛]]
“在過去一年試營運當中,我們所產出的再生產品,已經達到百分之百營收標準”
其中,用於晶圓清洗與濕式蝕刻製程的乾燥劑異丙醇,廢液可以經由蒸餾系統,再精餾為電子級異丙醇,回到廠內自用。廠區每月能收受2300噸廢液,產出300噸異丙醇。
[[台積電執行副總經理暨共同營運長 秦永沛]]
“未來零廢中心,預計每年將為我們減少,大約13萬公噸的廢棄物委外處理量,占公司中科廠區,廢棄物的85%以上。從環境損益分析,每年能為環境減少,約新台幣15億元的環境成本”
台積電化腐朽為神奇,同時為台灣第一個導入薄膜碳捕捉技術的示範領域,成為業界指標。
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